Repeatability: Wide-field: ±1 µm; high-precision: ±0.5 µm
XY Measurable Area: 3.54” × 3.54″ (90 × 90 mm)
Max Measurement Depth: 1.18″ (30 mm)
Repeatability: Wide-field: ±1 µm; high-precision: ±0.5 µm
XY Measurable Area: 3.54” × 3.54″ (90 × 90 mm)
Max Measurement Depth: 1.18″ (30 mm)